Recently, RTP-like processing has found applications in another rapidly growing field â€" solar cell fabrication. RTP-like processing, in which an increase in the temperature of the semiconductor sample is produced by the absorption of the optical flux, is now used for a host of solar cell fabrication steps, ncluding phosphorus diffusion for N/P junction formation and impurity gettering, hydrogen diffusion for impurity and defect passivation, and formation of screen-printed contacts using Ag-ink for the front and Al-ink for back contacts, respectively. The demands on an RTP system for solar cell fabrication are quite different from those for traditional microelectronics applications. Here, the primary emphasis is on throughput and cost (cost of ownership). These major considerations have resulted in RTP systems being belt-type, IR systems, which use tungsten-halogen lamps to illuminate the wafers from one side. The need for low-cost equipment and high throughput (600 wafers/hr) has some ramifications for process uniformity, with concomitant implications for the device performance.

Articles on Rapid Thermal Processing for Solar Cell:


RAPID THERMAL PROCESSING IN SILICON: MICROELECTRONICS TO SOLAR CELLS
Rapid Thermal Processing of Silicon Solar Cells -Passivation and Diffusion
Solar Cells on EFG and String Ribbon Silicon by rapid thermal processing
Lamp-based Processing Technologies for Silicon Solar Cell Manufacturing
Boron Back Surface Field Using Spin-On Dopants by Rapid Thermal Processing
RAPID THERMAL PROCESSING OF HIGH EFFICIENCY N-TYPE SILICON SOLAR CELLS WITH AL BACK JUNCTION


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